Beam Alignment - Hitachi 3400-N Using Manual

APPENDIX 1 continued
Aperture Alignment:
-Move to a distinct edge or small feature. And
activate "Aperture Align" Radio button.
-The "Wobbler" mode is activated to
exaggerate motion and assist you in aligning
the aperture. Using the "Red1" scan mode will
limit your vision and help you stay focused on
one location.
-Move the stigmator knobs on the Dial panel
movement. Movement onscreen should appear to be a flashing motion in one
location-not a rocking motion. If you have to turn the dials too far, return to the
mechanical alignment adjustors first.

Beam Alignment:

-Select "Beam Align Tilt"
-Turn "X" and then "Y" stigmation knobs until maximum
brightness is achieved
-Repeat on "Beam Align Shift"
Stigma Alignment:
-If the beam has been running for awhile, you may need
to Degauss
(Fig.A5-A)
results.
-Stigma Align X
stigmation dials
-Stigma Align Y
stigmation dials
-3 Step: repeat as needed until image just appears to
rd
move in and out towards you, not in X or Y directions.
-Close alignment window AND repeat Degauss step,
NOW-Repeat the Beam Alignment Procedure at 2 x Your Desired
(Fig.A4-B)
(Fig.A4-C)
the image before beginning for best
: Adjust BOTH X and Y
(Fig.A4-C)
to minimize rocking movement.
(Fig.21-X,Y)
: Adjust BOTH X and Y
(Fig.A4-C)
Magnification for Best Results
(Fig.A4-A)
Figure A4. Beam Alignment
to minimize image
(Fig.A3-X,Y )
(Fig.A1)
-A
}B
}C
-A
Figure A5. Beam Setup-Degauss