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4. Spcifications
Specification
Measuring length mm (inch)
Overall length mm (inch)
Max. travel mm (inch)
Scale accuracy (At 20 dC/68 dF)
Reference point accuracy
Return error
Repeatability
Temperature coefficient dC
Light source
Detecting mode
Operating temperature dC (dF)
Storage temperature dC (dF)
Supplied accessories
Scale measuring length
Instruction manual
M3 x 8 hex. socket-head cap screw
M3 x 30 hex. socket-head cap screw
M4 x 8 hex. socket-head cap screw
Plain washer (nominal 3)
Plain washer (nominal 4)
Reference plate
Spacer
Scale clamp
Cable clamp
M4 x 8 small screw
Accuracy chart
Reference point masking label (R/RS) —
Contents of the package
Detector head
Scale
1 set of supplied accessories
18
(E)
Performance and functions
10 (N, NS only), 40, 70, 120, 170, 220, 270, 320, 370, 420
58 mm (Measuring length: 10 mm) Open-sided type
Measuring length +26 mm (measuring length 40 to 420 mm)
Measuring length +2 mm (Measuring length: 10 mm) Open-
sided type
Measuring length +10 mm (measuring length 40 to 420 mm)
NS/RS type
Measuring length 10 mm
Measuring length 40 mm
Measuring length 70/120 mm
Measuring length 170/220 mm
Measuring length 270 mm
Measuring length 320 mm
Measuring length 370 mm
Measuring length 420 mm
N/R type
Measuring length 10 mm
Measuring length 40 mm
Measuring length 70/120 mm
Measuring length 170/220 mm
Measuring length 270/320/370 mm : ± 0.50 µm or less
Measuring length 420 mm
± 0.1 um (R/RS)
This is virtually eliminated. It should be considered to be less
than two resolution limits of the detector that is used.
This is virtually eliminated. It should be considered to be less
than one resolution limit of the detector that is used.
_1
_1
_0.7 x 10
(dF
)
Semiconductor laser 790 nm
Diffraction grating scanning interferometer
+10 to +30 (+50 to +86) (no moisture condensation)
_10 to +50 (+14 to +122) (Humidity: 60 % or less)
10
40
70
1
1
1
2
—
—
2
2
2
—
4
6
4
2
2
—
4
6
—
1
1
—
—
—
—
1
2
1
1
1
1
1
1
1
1
1
5
5
1
1
1
: ± 0.03 µm or less
: ± 0.04 µm or less
: ± 0.10 µm or less
: ± 0.18 µm or less
: ± 0.25 µm or less
: ± 0.34 µm or less
: ± 0.39 µm or less
: ± 0.44 µm or less
: ± 0.06 µm or less
: ± 0.08 µm or less
: ± 0.20 µm or less
: ± 0.35 µm or less
: ± 0.65 µm or less
_6
(0.39 x 10
_6
)
120
170
220
270
1
1
1
1
—
—
—
—
2
2
2
2
8
8
8
10
2
2
2
2
8
8
8
10
1
1
1
1
2
2
2
2
3
3
3
4
1
1
1
1
1
1
1
1
1
1
1
1
5
5
5
10
320
370
420
1
1
1
—
—
—
2
2
2
10
12
12
2
2
2
10
12
12
1
1
1
2
4
4
4
5
5
1
1
1
1
1
1
1
1
1
10
10
10
BS78
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