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7.6.27 Check The Column Hatch Gas Springs ..............................................................................97
7.6.28 Check The Top Column Oil Level.......................................................................................98
7.6.29 Check The Ion Trap Cable.................................................................................................99
7.6.30 Check The Foil .................................................................................................................99
7.6.31 Check The Operation Of All Doors ................................................................................... 100
7.6.32 Check The Viewport And Hatch ....................................................................................... 101
7.7 Software & System Check .......................................................................................................... 101
7.7.1 Verify Installed EBM Control Version.................................................................................. 101
7.7.2 Reset The Service Timers ................................................................................................. 103
7.7.3 Verify The Temperature Security Settings .......................................................................... 104
7.7.4 Verify The Process Themes Version .................................................................................. 105
7.7.5 Verify The LogStudio Version ............................................................................................ 108
7.7.6 Verify The Defect Detector Version .................................................................................... 108
7.7.7 Test The Emergency Stop................................................................................................. 109
7.7.8 Test The Alarm Tower ...................................................................................................... 110
7.7.9 Test The Light Curtain ...................................................................................................... 111
7.7.10 Test The Vacuum System Performance ........................................................................... 112
7.7.11 Test The Door Interlocks ................................................................................................. 114
7.7.12 Test The High Voltage Unit.............................................................................................. 115
7.7.13 Test The Ion Trap ........................................................................................................... 117
7.7.14 Test The Smoke Sensor.................................................................................................. 118
7.7.15 Run Beam Current Feedback Compensation .................................................................... 119
7.7.16 Test The Helium Ventilation............................................................................................. 121
7.7.17 Test The Air Ventilation ................................................................................................... 123
7.8 Complete System Verification ..................................................................................................... 124
7.8.1 Initial Setup ...................................................................................................................... 124
7.8.1.1 Adjust The Outermost Positions ............................................................................... 125
7.8.1.2 Adjust Rest Positions .............................................................................................. 127
7.8.1.3 Adjust The Rake Centre Position.............................................................................. 128
7.8.1.4 Run A Table And Rake Test..................................................................................... 130
7.8.2 Beam Calibration.............................................................................................................. 131
7.8.2.1 Auto Beam Calibration............................................................................................. 132
7.8.2.1.1 Run Auto Beam Calibration ............................................................................ 132
7.8.2.1.2 Run Initial Auto Beam Calibration.................................................................... 135
7.8.3 Run The Beam Verification Plate ....................................................................................... 136
7.8.3.1 Preparations Before The Verification Plate................................................................ 136
7.8.3.2 Melting The Pattern................................................................................................. 139
7.8.3.3 Evaluate The Verification Plate ................................................................................ 140
7.8.3.3.1 Dimensional Accuracy Test – 1 ....................................................................... 140
7.8.3.3.2 Beam Alignment Test – 2 ............................................................................... 141
7.8.3.3.3 Focus Offset Test – 3 ..................................................................................... 141
7.8.3.3.4 Deflection System Test – 4 ............................................................................. 142
7.8.4 Import A Build Project ....................................................................................................... 143
7.8.5 Check The Helium Ventilation............................................................................................ 144
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01
IM-710429
en-GB
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