38
37
36
35
34
33
0
10
100
95
90
85
80
75
70
65
60
0
10
0
10
Temperature recovery data
20
Time Minutes
Humidity recovery data
30sec. door open
60sec. door open
30sec. door open with N2 bubbling
60sec. door open with N2 bubbling
20
30
Time Minutes
CO2 density recover data
1 small door 60sec. open
1 small door 30sec. open
20
Time Minutes
- 103 -
AT:20
SV:37
CO2 setting: 5%
O2 setting: 5%
No load
1 small door 60sec. open
1 small door 30sec. open
30
AT:20
SV:37
CO2 setting: 5%
O2 setting: 5%
No load
40
50
AT:20
SV:37
CO2 setting: 5%(003MPa)
O2 setting: 5%(0.05MPa)
No load
30
40
60
40