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Hitachi S-4800 Instruction Manual page 12

Field emission scanning electron microscope
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High Temperature Hazard
Baking the electron gun part is carried out about once per 6 months to keep high vacuum inside
the part. When baking, the surface of the gun housing and ion pumps reaches around 250 °C.
The electron gun part is surrounded by a metal guard to prevent high temperature hazard caused
by direct contact. However, the temperature of the upper stage surface rises up to
100 °C and the temperature of the side cover surface also rises up to 75 °C. The maintenance
work of baking should be carried out by personnel trained by the manufacturer.
The operator should not touch the covers when the electron gun and ion pumps are heated up to
about 250 °C in order to keep the electron gun in ultra high vacuum. Touching these sections
would result in burns.
Note that the above heated parts are still hot even after stopping heating. Cooling down to close
to room temperature needs about 6 hours.
Magnetic Field Hazard
The ion pumps are constructed with permanent magnets. There is a fringing magnetic field of
about 10 mT at the ion pump surface and about 1 mT at the outside of the ion pump cover.
Any person who carries a pacemaker embedded is not allowed to approach the ion-pump.
Do not bring near the ion pump wristwatches and magnetic cards that are susceptible to
magnetic fields.
SAFETY - 4

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