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Hitachi S-4800 Instruction Manual page 18

Field emission scanning electron microscope
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Beware of
electric shock
Beware of high
temperature
Beware of low
temperature
Magnetic Fields
Voltages up to 100 V AC and 30 kV DC are used inside this
instrument. Do not touch inside or you may receive an electric shock.
Do not remove the covers of column unit, control unit or power unit
and do not touch internal parts or circuits while the instrument power
is turned on. There is a hazard of fatal or serious injury due to
electric shock.
Avoid removing the covers of the instrument. If they must be
removed, make sure to first turn off all power to the instrument.
Electron Gun / Ion pump Baking
The electron gun and ion pump are heated to about 250°C in order to
keep the electron gun in a high vacuum. Touching these sections
would result in burns.
Rotary Pump
The temperature of the oil rotary pump rises up to about 70°C, while it
is operating. Touching the pump may also result in burns.
Liquid Nitrogen
When you replenish liquid nitrogen in the cold-trap of DP and the
anti-contamination trap, be sure to wear eye-protection glasses and
protective gloves to keep liquid nitrogen from splashing on the eyes or
the skin.
Anyone working on the electrical part of the system should follow the
correct lock-out tag-out procedures for that location.
The user should prepare a mains switch box on which the lock-out
and the tag-out procedures are provided.
Electrical hazards can occur if lock-out tag-out procedures are not
followed.
The ion-pump produces magnetic fields. There are fringing magnetic
fields of about 100 Gauss from the ion-pump and 10 Gauss at the
outside of the ion-pump cover.
Any person who has a pacemaker embedded is not allowed to
approach the ion-pump.
Do not bring near to the ion-pump wristwatches and magnetic cards
that are susceptible to magnetic fields.
WARNING
SAFETY - 10

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