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gas pipe: Refer to page 17 for gas cylinder connection. Ensure that
23. Connecting port A/B for N
/O
2
2
2
the gas pressure is set at 0.05 MPaG (0.5 kgf/cm
G, 7.1 psiG). Refer to page 30 for automatic N
(or O
)
2
2
gas cylinder changeover.
24. Attachment location for electric key: This is the attachment location for the electric key included in
the optional Component H
O
Decontamination Kit (MCO-HL). This kit must be attached to perform H
O
2
2
2
2
decontamination. Refer to the installation procedure for MCO-HL for details.
25. Gas injection nozzle
* MCO-19M(UVH)/19M(UV) or when an optional UV System Kit (MCO-19UVS) is installed.*
11
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