Hitachi TM3000 Instruction Manual page 261

Code Error Message
1581 The power supply of +15V for
DEF was shut down.
Start up the main unit and
application again.
1582 The power supply of +12V for
HVT was shut down.
Start up the main unit and
application again.
1583 The power supply of -15V for
HVC was shut down.
Start up the main unit and
application again.
The power supply of +15V for
1584
HVC was shut down.
Start up the main unit and
application again.
The amount of the image shift
1600
movement exceeds 50 um.
Reset the image shift, and move
the stage.
1611 Time has run out.
"Stage initialized" cannot be
executed.
Start up the main unit and
application again. Contact
service if the failure occurs
repeatedly.
Countermeasure
An overcurrent in the power supply or a blown
fuse (F8 on the COLHVC00 board) was found.
Click the [OK] button to dismiss the message.
Restart the main unit. If the message appears
repeatedly, contact the nearest service
representative.
An overcurrent in the power supply or a blown
fuse (F7 on the COLHVC00 board) was found.
Click the [OK] button to dismiss the message.
Restart the main unit. If the message appears
repeatedly, contact the nearest service
representative.
An overcurrent in the power supply or a blown
fuse (F6 on the COLHVC00 board) was found.
Click the [OK] button to dismiss the message.
Restart the main unit. If the message appears
repeatedly, contact the nearest service
representative.
An overcurrent in the power supply or a blown
fuse (F5 on the COLHVC00 board) was found.
Click the [OK] button to dismiss the message.
Restart the main unit. If the message appears
repeatedly, contact the nearest service
representative.
The message appears when the image shift did
not proceed to a specified position.
Click the [OK] button to dismiss the message.
The range over which the FOV can be moved by
image shift is limited; if the FOV cannot be move
further, press the [Reset] button once, and use
the XY knob to move the FOV to conduct an
observation.
This message appears if a time-out (300 s) has
occurred during the initialization of the motor
stage.
Click the [OK] button to dismiss the message.
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