Spare Parts - Hitachi TM3000 Instruction Manual

6.3 Spare Parts

The spare parts shown below must be obtained when the system is operated for a long time.
The number of spare parts you need to stock differs depending on your usage. (See Table
6.3.)
Part No.
J821153
J821154
J821156
J821157
J821158
J821159
J821591
J821594
J821055
55E-1392
55E-1682
L456819
L456111
L456850
L456824
Table 6.3 Spare Parts
Name
Fuse For maintenance (0.3 A)
Fuse For maintenance (0.5 A)
Fuse For maintenance (1.6 A)
Fuse For maintenance (2 A)
Fuse For maintenance (3.2 A)
Fuse For maintenance (5 A)
Alarm Fuse For maintenance (2 A)
Alarm Fuse For maintenance (5 A)
Fuse For maintenance (6.3 A)
∅70 mm
Specimen stage
∅30 mm
Specimen stage
O-ring For electron gun
O-ring For inner pipe
O-ring For specimen chamber port (front)
O-ring For specimen chamber port (side)
Remarks
6 - 4
Quantity
Used
2
2
2
2
2
2
2
2
2
－
－
1
1
1
1