HP 5973 MSD Hardware Manual page 19

gas last time.
Flow control module state diagram:
Result Gas A flows
Control panel lights (LEDs)
Gas A (green) On
Gas B (amber) Off
Purge (red) Off
Gas Off (red) Off
Valve state
Valve A Open
Valve B Closed
On → setpoint
MFC
Isolation valve Open
Gas B flows Purge
with Gas A
Off On
On Off
Off On
Off Off
Closed Open
Open Closed
On → setpoint On → 100%
Open Open
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Purge Pump out
with Gas B flow module
Off Off
On Off
On On
Off On
Closed Closed
Open Closed
On → 100% On → 100%
Open Open
 Hardware Reference
Standby, vented,
or EI mode
Off
Off
Off
On
Closed
Closed
Off (→0%)
Closed
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