Pressure-Related Symptoms (Overview) - HP 5973 MSD Hardware Manual

 Troubleshooting
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Pressure-related symptoms (overview)

The following symptoms are all related to high vacuum pressure. Each symptom is
discussed in more detail in the following pages.
The mass flow controller is calibrated for methane, and the high vacuum gauge
controller is calibrated for helium, so these measurements are not accurate in
absolute terms, They are intended as a guide to typical observed readings. They
were taken with the following set of conditions:
Source temperature
Quad temperature
Interface temperature
Helium carrier gas flow
MFC (%) Pressure (Torr)
Methane
5.6 × 10
10
7.7 × 10
15
9.8 × 10
20
1.2 × 10
25
1.4 × 10
30
1.6 × 10
35
1.8 × 10
40
2.0 × 10
45
2.2 × 10
50
2.7 × 10
60
74
250°C
106°C
320°C
1ml/min.
Isobutane
6.5 × 10
-5 -5
9.2 × 10
-5 -5
1.2 × 10
-5 -4
1.4 × 10
-4 -4
1.8 × 10
-4 -4
2.0 × 10
-4 -4
2.3 × 10
-4 -4
2.6 × 10
-4 -4
3.0 × 10
-4 -4
3.5 × 10
-4 -4
Ammonia
4.7 × 10
-5
6.7 × 10
-5
8.5 × 10
-5
1.0 × 10
-4
1.2 × 10
-4
1.4 × 10
-4
1.6 × 10
-4
1.9 × 10
-4
2.1 × 10
-4
2.5 × 10
-4