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9
Vacuum system
Vacuum system
This section lists replacement parts available for the vacuum system. It includes:
clamps, O-rings and seals, foreline pump and related components, diffusion pump
vacuum system components, and turbomolecular pump vacuum system
components.
Table 12
O-rings and seals
Description
Calibration valve O-ring (1/4-inch)
Diffusion pump baffle adapter O-ring
End plate O-ring (for front and rear end plates)
GC/MSD interface O-ring
HED feedthrough
HED feedthrough O-ring
KF10/16 seal (foreline pump inlet, oil trap, and diffusion pump outlet)
KF25 O-ring assembly (turbo pump outlet)
KF50 seal (diffusion pump inlet)
Side plate O-ring
Triode gauge tube O-ring
Turbo pump seal
Vent valve O-ring (1/4-inch)
1
260
Parts
1
The turbo pump and its seal are not user-replaceable parts. Refer
service to your Hewlett-Packard service representative.
HP part number
0905-1217
0905-1443
0905-1441
0905-1405
G1099-80012
0905-0490
0905-1463
0100-1551
0100-1884
0905-1442
0905-1070
0100-1879
0905-1217
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