INTRODUCTION
Thank you for purchasing the SECS/GEM communication software.
This manual describes the necessary system configuration, specifications, wiring, and troubleshooting to use the SECS/GEM
communication software.
Before using this product, please read this manual and the relevant manuals carefully and develop familiarity with the
functions and performance of the SECS/GEM communication software to handle the product correctly.
Please make sure that the end users read this manual.
About this manual
This manual describes the SECS/GEM communication software that has been installed on a C Controller module or C
intelligent function module. Before using the SECS/GEM communication software, carefully read the relevant manuals of the
C Controller module or C intelligent function module to thoroughly understand the functions and performance of the module.
For details of the SEMI
standards, please check the SEMI standards.
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