Measurement Method Of 3D Information - Hitachi TM3030 Plus Instruction Manual

7.2 Measurement Method of 3D Information

3D-Image Viewer measures 3D information in a manner using each element of the
four-segment BSE detector to detect and calculate directional BSE signals.
Figure 7.2 Detection Method by 4-Segment Backscattered Electron
NOTE : If the tilt angle of specimen structure is larger than the detection range of the
BSE detector (approximately 50°), BSE signals are not detected, and therefore,
an accurate 3D display or measurement cannot be performed. Such a
specimen may result in a profile different from the actual profile.
NOTE : This function utilizes detection signals from four elements in the BSE detector. If
the surface of the detection elements are contaminated or scratched, the
variation arises in the detection sensitivity, with the result that an accurate 3D
display or measurement cannot be performed.
NOTE : For executing the 3D-Image Capture function, a recommended distance is
8.5 mm (analysis position)  1.0 mm or less. Outside of the recommended
range, the measurement accuracy may decline.
Electron beam
Objective lens
A
B
Specimen
7 - 3
High sensitive
D
4-segment BSE detector
C
Backscattered electron