Specifications - Hitachi TM3030 Plus Instruction Manual

7.3 Specifications

1. 3D-Image Capture Function
Capture function:
Capture resolution:
Brightness adjustment: Automatic
2. 3D-Image Viewer Function
Import function:
Measurement performance: Depth accuracy:  20% (Reference)
NOTE : In the case of the combination of [BSE] and [Charge-up Red.] from the Signal
Select and Observation mode respectively, or in the case where [5 kV] is
selected from the Observation condition, the measurement accuracy will be
deteriorated due to the effect of electron scattering.
NOTE : It is not possible to utilize SE images or Mix images for 3D
display/measurement.
NOTE : Measurement performance depends on the calibration accuracy, the condition
of the specimen, the observation magnification, the observation mode, and the
observation condition.
NOTE : A steep topographical surface exceeding detectable angle might not be
displayed accurately.
Measurement function: Cross-sectional profile display
Auto capture of 4-element image data from a BSE detector
Quick save (640  480 pixels)
Save (1,280  960 pixels)
4-element image data auto select/read function
(SEM condition auto import function)
(Magnification: 500x, Observation mode : [Standard],
Observation condition: [15 kV], Reference values by
measurement of Vickers impressions.)
Detectable angle range:  50° (Reference)
(Observation mode: [Standard])
X, Y, Z, and Flat calibration functions
Measurement of distance in horizontal (X), vertical direction (Y),
length (lp) and angle between two arbitrary points that are
specified on the image.
Surface area measurement
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