5.2
Beam Axis Alignment ............................................................................................ 5- 11
5.3
5.4
5.5
Error Messages ..................................................................................................... 5- 29
5.5.1
5.5.2
5.5.3
5.5.4
Wait Message Window .............................................................................. 5- 51
5.5.5
Termination Process .................................................................................. 5- 53
6
REPLACEMENT PARTS ......................................................................................... 6-
6.1
Consumables ........................................................................................................ 6-
6.2
Limited Life Parts .................................................................................................. 6-
6.3
Spare Parts ........................................................................................................... 6-
7
3D-VIEW (Option) ................................................................................................... 7-
7.1
Functional Outline ................................................................................................. 7-
7.2
7.3
Specifications ........................................................................................................ 7-
7.4
7.5
7.6
7.7
7.8
7.9
Menu Functions .................................................................................................... 7- 15
7.12 Mouse Pointer ..................................................................................................... 7- 30
7.13 3D Viewer Functions ............................................................................................ 7- 31
7.17 Measurement....................................................................................................... 7- 48
- v -
1
1
2
4
1
1
3
5
7
7
8