Calibration Of 3D Measurement - Hitachi TM3030 Plus Instruction Manual

7.22

Calibration of 3D Measurement

This chapter explains the basic operations of calibration for performing 3D measurement.
Improving the accuracy of 3D measurement requires the calibration of measurement
conditions (specimen type, SEM accelerating voltage, magnification, working distance).
3D image can be displayed without calibration. However, 3D image display might be greatly
different from ruggedness shape on an original surface of the specimen. There are three
types of calibration, [X,Y], [Z], and [Flat]. Executing the calibration by using the sample
whose shape and size are known is required under the observation condition to be used.
The state of the calibration and the image condition are displayed in the [Condition] block of
the main operation screen of 3D-Image Viewer view. For the item calibrated, an orange mark
is displayed at the left of each button. When the calibration is not executed, a white mark is
displayed.
See 7.11 Profile Settings View Function.
NOTE : When the ruggedness shape on the specimen surface exceeds signal detection
angle ( 50 degrees), 3D measurement cannot be accurately executed even if
calibrating it (Example: The hole that opens vertically and etc.).
NOTE : The value of "D" that shows the distance from the BSE detector to a sample is
displayed as "WD (Working distance)" that shows the focal length in 3D-Image
Viewer. The relation of the value of "D" and "WD" is WD = D  1.5 mm.
Image condition
Figure 7.22-1 Condition Block (After calibration)
Figure 7.22-2 Calibration State (Before calibration)
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Calibration state
X, Y calibration button
Z calibration button
Flat calibration button