HP 5501A Operating And Service Manual page 63

SINGLE B E A M
INTERFEROMETER
B E A M BENDER
RETROREFLECTOR
1
?REFLECTOR
RECEIVER
SPLITTER
L I N E A R
INTERFEROMETER
B E A M SPLITTER
RECEIVER
SPLITTER
RETROREFLECTOR
SINGLE B E A M
INTERFEROMETER
Figure 2-33. Four-Axis Configuration
NOTE
In a measurement application where the 10702A Linear Inter-
ferometer is the moving component and the 10703A Retro-
reflector is the fixed reference, the 10702A Linear Interfero-
meter must have the Option 001 Windows to eliminate align-
ment errors. When using the 10705A Single Beam Interfero-
ment along with the 10704A Retroreflector, the interferometer
must be the fixed component with
only the retroreflector
allowed to move.
For a detailed explanation, see Figure 2-77.
If a right angle beam bend is made through the 10702A or
10705A Interferometers, the above does not apply.
In Figure 2-34, an X-Y stage measurement configuration utilizing the 10706A Plane Mirror
lnterferometer is illustrated. The X-Y stage has plane mirrors mounted at 90° to each other
on the upper portion of the stage which serve a s the retroreflectors for the plane mirror inter-
ferometer. The advantages of this configuration are discussed later in this section. The
10706A Plane Mirror lnterferometer is used to bend the laser beam to the correct orientation.