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LASER
BEAM
PLANE
MIRROR
INTERFEROMETER
MIRRORS
LASER BEAM
RECEIVER
y n
In
addition,
if
the
mirrors
are
aligned
at
exactly
90'
to
each
other,
the
orthogonality
of
the
positioning
system
is
determined
by
the
mirrors
and
not
the
X-Y
slides.
Figure
2-45
illust-
rates
the
actual
measurement
which
takes
place
if
there
are
any
geometric
errors
in
the
X-Y
stage.
#4--
\
) H d C
\
\
\
1
\
\
\
x-Y
STAGE
1
X
AXIS
\
\
\
\
MEASUREMENT
A
\
/
I
\
:
+*
\
\
\
\
\
\
\
\
\
\
/ / &
\
4)
a
MIRROR
I
MIRROR
Y
AXIS
PLANE
MIRROR
l
NTERFEROMETER
tb
RECEIVER
Figure
2-45.
X-Y
Stage
Gecrrrretrr~
Errors
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