Using The Robot In Clean Room - Toshiba TH180 Instruction Manual

2.8

Using the Robot in Clean Room

The main robot is designed pursuant to the Clean Class 10.
To be more specific, when this robot is operated in the clean bench (Clean Class 1 or
less) installed in the downflow clean room, the number of 0.3 µm or more fine particles
3
in 1 ft as measured on the surface of the axis 3 stroke lower limit position is 10 or less.
The downflow air speed should be 0.3 to 0.5 m/s.
As the TS3000 controller is not designed to satisfy the specified clean class, take
careful precautions to select the place of installation.
In the clean robot, an air tube is incorporated for ventilation. To operate it as the
clean robot, scavenge by connecting a scavenging vacuum pump (or equivalent, which
is to be provided by the customer) with the air joint. The target scavenging volume is
50 L/min.
When the robot is operated without scavenging, the specified clean class cannot be
maintained.
Table 2.3 List of level 8 alarms
Error code
8–065 Axis1 Encoder abnormal
8–097 Axis2 Encoder abnormal
8–129 Axis3 Encoder abnormal
8–161 Axis4 Encoder abnormal
8–193 Axis5 Encoder abnormal
8–225 Axis6 Encoder abnormal
TRANSPORTATION AND INSTALLATION MANUAL
Descriptions
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STE 85389