Open the [Utility] tab by pressing on it.
Select only "Carry Out" by checking its check box.
Press the [Execute] button in the upper screen.
Perform as follows as per the result of step 26.
In step 26, measured data was Not saved.
Finish the adjustment.
In step 26, measured data was saved or mask camera offsets were adjusted.
Redo from step 5 for re-adjustment.
SI1906002E-001=YSP10 installation and adjustment procedures
114/120
For Service Engineers
Service Information