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1-2 Measurement program
The IV-S20 integrates the following eight measurement programs: Positional deviation, absolute position
measurement, matching inspection, distance and angle measurement, lead inspection, area
measurement by binary conversion, object counting by binary conversion, labeling measurements by
binary conversion, and point measurements.
You can select operating condition parameters to suit your application of the IV-S20.
[1] Positional deviation/absolute position measurement
The gray scale search function makes it possible to measure positional deviation as
well as the absolute position.
Purpose
· It is also possible to detect the position of sub-pixel units with great accuracy.
Application
Used to determine the position of machine parts and substrates.
[Determining the location of the positioning (the fiducial mark) mark that identifies the
position of the substrate]
(1) 1 point search: Detecting the deviation in position in X and Y directions
(2) 2 point search: Determining positional deviation in X and Y directions as well
as rotational deviation
Reference image a: Center coordinates (Xa1,Ya1)
Example
· The deviation angle (θ), determined in the 2 point search, is used to readjust the
rotation of the image for measurements 1 to 3.
Operating instruction example _ See "3-2 Position measurement."
Detailed
Setting measurement program _ See "9-3 Positional deviation/absolute position
instruc-
tion
measurement."
Reference image: Center coordinates (X1,Y1)
Inspection Image: Center coordinates (X2,Y2)
Y2-Y1
Search area
X2-X1
Search area
(image a)
Xa2-Xa1
[Measured result]
· Center coordinates of image a: (Xa2,Ya2)
· Amount of deviation of image a: Xa2-Xa1, Ya2-Ya1
· Center coordinates of image b: (Xb2,Yb2)
· Amount of deviation of image b: Xb2-Xb1, Yb2-Yb1
· Deviation angle: (θ)
1-3
[Measured result]
Center coordinates: (X2,Y2)
Amount of deviation: X2-X1, Y2-Y1
Inspection image a: Center coordinates (Xa2,Ya2)
Reference image b: Center coordinates (Xb1,Yb1)
Ya2-Ya1
Inspection image b: Center coordinates (Xb2,Yb2)
θ
θ)
Anglar deviation: (
Xb2-Xb1 Search area (image b)
Overview
1
Yb2-Yb1
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