When using the Manipulator in the clean room, follow the steps below before the installation.
(1) Unpack the Manipulator outside of the clean room.
(2) Secure the Manipulator to delivery equipment such as a pallet with bolts so that the
(3) Wipe off the dust on the Manipulator with a little alcohol or distilled water on a lint-
(4) Transport the Manipulator into the clean room.
(5) Secure the Manipulator to the base table.
C12 Rev.3
Manipulator does not fall over.
free cloth.
Setup & Operation 3. Environment and Installation
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