Customizing The Wafer Prober - HP 4062UX Installation Manual

Customizing the Wafer Prober

Use this section to customize the wafer prober. If your HP 4062UX/F system is not used with
an automatic or semiautomatic wafer prober, skip this section and go to the next chapter.
The HP 4062 supports the following wafer probers:
Electroglas 1034X, 2001X, 2010X, 3001X, 4060X, and 4080X
TSK A-PM-3000A, -6000A, -7000A, -60A, -80A, and -90A
Tokyo Electron 4000A, 4400A, 19S, 20S, 80S, 78S, and 80W
Micronics Japan SP-900B, -1000B, and -1100B
Your wafer prober must be con gured for the HP 4062 system. Contact your
Note
wafer prober manufacturer for details on the HP 4062 con guration.
The HP-IB primary address of the wafer prober registered in the SYSCONFIG le must be
the same as the HP-IB primary address of the wafer prober. Con rm the HP-IB primary
address of your wafer prober. The default select code (for series 300 computers) or logical unit
number (for series 700 computers) set in the /usr/pcs/etc/SYSCONFIG le is 25.
To show and modify the SYSCONFIG le, use the following procedure:
1. Boot the HP-UX system.
2. Log in as a superuser.
3. Start HP BASIC/UX by entering
4. Load the SYSCONFIG le, which is stored in the /usr/pcs/etc directory, using GET
command as follows:
GET "/usr/pcs/etc/SYSCONFIG"
5. Start the BASIC EDITor by entering
6. Modify the contents of the SYSCONFIG le, if needed.
7. If you modify the le, save the SYSCONFIG le as follows:
RE-SAVE "/usr/pcs/etc/SYSCONFIG"
If the registered address of the wafer prober is the same as the address of
Note
another device, modify the address of the wafer prober.
.
rmb
4 Return 5
.
EDIT
4 Return 5
Software Installation 5-19