System Performance Veri Cation For Hp 4062Ux - HP 4062UX Installation Manual

Semiconductor process control system semiconductor parametric test system
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System Performance Verification for HP 4062UX
The Performance Veri cation (PV) program veri es the operation of the HP 4062UX. It is
contained in the PV4062 le. The PV 4062 program exists on the /usr/pcs/diag directory.
The PV4062 program consists of the following ve parts:
4062UX W/O DVM
4062UX W/ DVM
4142B
START
VIEW RESULT
After installation, you must perform only the 4062UX W/O DVM test. To print veri cation
results, use the VIEW RESULT function.
Before running PV4062, make sure that no system instrument has failed self-test at power on.
For failures, refer to the chapter/section 3 in the
failed for instructions on handling self-test failures.
The HP 4062UX needs at least 40 minutes to warm up. If you don't allow the
Note
HP 4062UX enough time to warm up, Hewlett-Packard does not guarantee
any performance veri cation data.
Table 6-1 shows the equipment required to run performance veri cation.
Table 6-1. Required Equipment for Performance Verification
Required Equipment
Test Fixture Adapter
Relay Test Adapter
System Calibration Module
If the HP 4062UX is equipped with an HP 4284A 20 Hz { 1 MHz Precision LCR Meter, both the HP
1
16346B and the HP 16346C are required. Otherwise, only the HP 16346B is required.
If the HP 4062UX is equipped with an HP 4284A 20 Hz { 1 MHz Precision LCR Meter, only the HP
2
16366B is required. Otherwise, either HP 16366A or HP 16366B is required.
The pin boards must be installed into the following number slots of the SWM:
48-pin SWM
96-pin SWM with CMU
(HP 4280A)
96-pin SWM with CMU84
(HP 4284A)
Operation Manual
For 48-pin SWM
HP 16066A
HP 16075A
HP 16346B/C
4-, 8-, 12-, 16-, 20-, 24-, 28-, 32-, 36-, 40-, 44-, and 48-th slots
4-, 12-, 16-, 20-, 24-, 28-, 32-, 36-, 40-, 68-, 72-, 76-, 80-, 84-, 88-,
and 96-th slots
4-, 12-, 16-, 20-, 24-, 28-, 32-, 36-, 40-, 44-, 48-, 52-, 56-, 60-, 64-,
68-, 72-, 76-, 80-, 84-, 88-, and 96-th slots
of the instrument that
For 96-pin SWM
HP 16370A
HP 16355A
HP 16366A/B
1
System Verification 6-5
2

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