HP 4062UX Installation Manual page 137

Semiconductor process control system semiconductor parametric test system
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Table 6-3. Required Equipment for Performance Verification
Required Equipment
HP 16066A Test Fixture Adapter
HP 16075F Relay Test Adapter
04085-60006 Relay Test Shorting Adapter
HP 16346A/B System Calibration Module
HP 16346C System Calibration Module
HP 10503A or 8120-1840 BNC-BNC Cable (2 cables)
HP 10833B/C HP-IB Cable
HP 16354F Pulse Test Module
HP 54121T Digitizing Oscilloscope
HP 33340C Option 020 20 dB Attenuator
1250-1200 SMA(m)-to-BNC(f) Adapter
Furnished with the HP 4062F system.
1
If HP 41420A 200 V/1 A SMU is installed in the HP 4142B, the HP 16346B must be used for the W/O DVM
2
tests.
If the HP 4062F is equipped with an HP 4284A Precision LCR Meter, both the HP 16346B and the HP 16346C
3
are required for the 4062F DC W/O DVM tests. Otherwise, only the HP 16346B is required.
Make sure HP 16346A/B/C, HP 3456A/HP 3458A, and HP 54121T are
Note
calibrated. Refer to the operation or service manual of each product for the
calibration cycle.
For performance veri cation, pin boards must be installed in the SWM at
Note
following pin board slots at least:
slots: 4, 8, 12, 16, 20, 24, 28, 32, 36, 40, 44, and 48
1
1
1
2
3
1
Test Name
4062F DC
W/O DVM
(Connection Test and
p
p
p
p
p
System Verification 6-25
4062F AC
Calibration)
p
p
p
p
p
p

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