HP 4062UX Installation Manual page 44

Semiconductor process control system semiconductor parametric test system
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Automatic Wafer Probers
Before you can install the SWM and HP 16377A/B Personality Board onto the wafer prober,
mounting hardware|hinge, head plate, and so on|must be fabricated. For this purpose, the
dimensions and other mechanical speci cations for the SWM and the personality board are
provided in the
Pre-installation Manual
Keep hands clear of the SWM, hinge, and wafer prober when lowering the SWM
Warning
into position on your wafer prober.
Do not touch the measurement pins of the SWM or the printed patterns
Caution
on the personality board. Oil, perspiration and dirt prevent good electrical
contact, deteriorate insulation, and degrade measurement accuracy.
After you have installed the HP 16377A/B Personality Board on the wafer
Note
prober, adjust the position of the personality board so the pin board numbers
printed on the personality board line up with the corresponding numbers on
the SWM. Con rm that all the SWM measurement pins are making good
electrical contact with the pin contacts of the personality board.
Manual and Small Automatic Wafer Probers
Because the SWM cannot be installed directly on the manual wafer probers or small
automatic wafer probers, you need the HP 16378B Extension Cable Fixture to connect the
SWM to the manipulator or probe card of the prober.
The extension cable xture installs onto the SWM, and secures by pushing the right and
left side levers down, similar to the HP 16370A Test Fixture Adapter. Wires from the
manipulator or the probe card of the prober can then be soldered to the measurement pins of
the extension cable xture.
Refer to the HP 16378B
Potentially hazardous voltages may be present at the measurement pins of the
Warning
extension cable fixture when the SWM output enabled lamp is lit. Make sure the
protective cover of the cable fixture is installed before you operate the system.
Do not touch the measurement pins of the SWM or the extension cable
Caution
xture. Oil, perspiration, and dirt prevent good electrical contact and degrade
measurement accuracy.
3-10 Switching Matrix Installation
.
for more information on the extension cable xture.
Operating Note

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