The 4062Ux W/O Dvm - HP 4062UX Installation Manual

Semiconductor process control system semiconductor parametric test system
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The 4062UX W/O DVM

The 4062UX W/O (without) DVM test provides ten subtests for verifying SWM, DCS, CMU,
and CMU84 operation. Table 6-2 lists the subtests and provides a description of the tests and
the equipment needed.
The PV4062 program is completely interactive and provides two test modes: sequential and
single. In the sequential test mode, PV4062 performs each subtest in the sequence listed
in Table 6-2. In the single test mode, tests can be performed individually in any desired
sequence. For both test modes, PV4062 displays a running record of test results.
This section provides instructions for performing subtests of the 4062UX W/O DVM in
the
sequential test mode
procedures, refer to the
Subtest
Relay Test
SMU Test
VS Test
VM Test
AFU Test
CMS C-G Test
2
CMS Bias Test
2
CMU84 C-G Test
3
CMU84 Bias Test
3
DC Leak Test
If your system is equipped with a 96-pin SWM, input relays are also tested. If your SWM has a port expander, the
1
port expander relays are also tested.
If the HP 4280A CMU is present in your system and is connected to the SWM properly, this test is performed.
2
If the HP 4284A CMU84 is present in your system and is connected to the SWM properly, this test is performed.
3
6-8 System Verification
only. For more details on each test and for system troubleshooting
HP 4062 Service Manual
Table 6-2. Subtests of the 4062UX W/O DVM
Description
Tests all relay operations on the SWM pin
boards.
1
Performs the DCS self-test and checks SMU
accuracy (four SMUs).
Checks the DCS VS1 and VS2 accuracy.
Checks the DCS VM1 and VM2 accuracy.
Performs an analog feedback measurement using
the DCS AFU, and checks measurement results
against test limits.
Performs the CMU ROM/RAM Test, checks
C-G measurement accuracy, and measures
measurement pins' residual capacitance.
Checks the CMU internal dc bias source
accuracy.
Checks C-G measurement accuracy, and
measures residual capacitance of the
measurement pins.
Checks the internal dc bias source accuracy of
the CMU84.
Measures the SWM dc leakage current.
.
48-pin SWM
HP 16075A
HP 16346B HP 16366A/B
HP 16346B HP 16366A/B
HP 16346B HP 16366A/B
HP 16346B HP 16366A/B
HP 16346B HP 16366A/B
HP 16346B HP 16366A/B
HP 16346C
HP 16346C
HP 16066A
96-pin SWM
HP 16355A
HP 16366B
HP 16366B
HP 16370A

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