HP 4062UX Installation Manual page 143

Semiconductor process control system semiconductor parametric test system
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3. Select the
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Start
Figure 6-32 is displayed.
d
Before executing the desired test, attach the proper adapter to the SWM.
Select the desired softkey -------- Press [SHIFT][MENU] for more keys.
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c
4. Press
4 Shift 5 4 Menu 5
no test xture) is installed on the SWM, then select the
4062F DC W/O DVM subtests sequentially.
softkey. The 4062F DC W/O DVM test menu page similar to
M E N U
* * * * * * * * * * * * * * * * * * * * * * * *
Relay Test
*
SMU Test
*
VS Test
*
VM Test
*
AFU Test
*
CMU84 C-G Test
*
CMU84 BIAS Test
*
DC Leakage Test
* * * * * * * * * * * * * * * * * * * * * * * *
Relay Test .................................. 16075F, 04085-60006
SMU, VS, VM, AFU, CMU C-G, CMU BIAS Tests ... 16346A/B
CMU84 C-G, CMU84 BIAS Tests ................. 16346C
DC LEAK Test ................................ 16066A
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RELAY
SMU
VS
Figure 6-32. 4062F DC W/O DVM Menu Page
to display additional softkeys. Be sure the test xture adapter (with
Tests can be executed individually by
selecting the corresponding
The Relay Test should be executed first. *
All tests can be executed sequentially *
by selecting the "SEQ" softkey.
User 1
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VM
AFU
CMU84
C-G
NNNNNNNNNNNNNNNNN
SEQ
a
*
*
softkey.
*
*
*
Caps
Running
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CMU84
DC LEAK
b
BIAS
softkey to perform all
System Verification 6-31

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