Smu Test Results Page - HP 4062UX Installation Manual

Semiconductor process control system semiconductor parametric test system
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8.
SMU Test
Remove the relay test adapter from the SWM, install the HP 16346A/B System
Calibration Module, then select the
nishes, test results are displayed as shown in Figure 6-15.
d
c
6-34 System Verification
NNNNNNNNNNNNNN
DCS PASSED SELF-TEST
++++++++++++++++++++ SMU TEST ++++++++++++++++++++
| RESULT | REPEAT
OK
SMU TEST FINISHED
VS Test is next. Select NEXT to go on. Select SKIP to skip this test.
aaaaaaaaaaaaaaa
aaaaaaaaaaaaaaa
aaaaaaaaaaaaaaa aaaaaaaaaaaaaaa
NEXT
SKIP
Figure 6-35. SMU Test Results Page
softkey to start the SMU Test. When the test
NEXT
| SPOT
OK
|
User 1
aaaaaaaaaaaaaaa aaaaaaaaaaaaaaa aaaaaaaaaaaaaaa aaaaaaaaaaaaaaa
|---TEST RESULTS--|
| RELAY
|OK
|
| SMU
|OK
|
| VS
|
|
| VM
|
|
| AFU
|
|
| CMS C-G |
|
| CMS BIAS |
|
| DC LEAK |
|
Caps
Running
EXIT
a
b

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