Afu Test Results Page - HP 4062UX Installation Manual

Semiconductor process control system semiconductor parametric test system
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11.
AFU Test
Select the
NNNNNNNNNNNNNN
NEXT
are displayed as shown in Figure 6-18.
d
c
If the system is equipped with an HP 4280A CMU, the CMS C-G Test is
Note
next. Go to next step.
If the system is equipped with an HP 4284A CMU84, the CMU84 C-G Test
is next. Go to step 14.
6-36 System Verification
softkey to start the AFU Test. When the AFU Test nishes, test results
++++++++++ AFU TEST ++++++++++
| AFU
|
OK
AFU TEST FINISHED
CMS C-G Measurement Test is next. Select NEXT.
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NEXT
SKIP
Figure 6-38. AFU Test Results Page
|
User 1
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|---TEST RESULTS--|
| RELAY
|OK
|
| SMU
|OK
|
| VS
|OK
|
| VM
|OK
|
| AFU
|OK
|
| CMS C-G |
|
| CMS BIAS |
|
| DC LEAK |
|
Caps
Running
EXIT
a
b

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