Umbilical Cable ................................................................................................. 247
XY Table Components ................................................................................................. 249
Y Home Sensor .................................................................................................. 249
X Motor ............................................................................................................ 252
Removing the X motor .................................................................................... 252
Installing the X motor ..................................................................................... 256
Y Motor ............................................................................................................ 260
Removing the Y motor .................................................................................... 260
Installing the Y motor ..................................................................................... 262
Y Motor Belt ...................................................................................................... 263
Y Drive Rod ....................................................................................................... 272
XY Table ........................................................................................................... 281
Removing the XY table ................................................................................... 282
Z Stage Components ................................................................................................... 304
Z Home Sensor .................................................................................................. 304
Chamber Fans ................................................................................................... 307
Chamber Heaters ............................................................................................... 310