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Setup & Operation 2. Specifications
2.3.2 Table Top Cleanroom-model: C Type
Part Names
The following figure shows the additional parts and specifications for the Table Top Cleanroom-model when
compared with the Standard-model in appearance.
Upper bellows
Lower bellows
Signal cable connector
User connector (15-pin D-sub connector)
14
Plate cover
(For static electricity
countermeasure)
(Sealing tape)
(Sealing tape)
Exhaust port
E2C Rev.6
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